In-Situ Nanoindentation Surface Topography of Lead-Free Piezoelectric Thin Films

In-Situ Nanoindentation Surface Topography of Lead-Free Piezoelectric Thin Films

Surface roughness significantly affects the performance of microelectromechanical systems (MEMS) and piezoelectric films. This study investigates the impact of surface roughness on the mechanical properties of thin piezoelectric films using nanoindentation and scanning probe microscopy (SPM). Four p...

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Bibliographic Details
Main Authors: Maxence Bigerelle, Julie Lemesle, Alex Montagne, Denis Remiens
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Applied Sciences
Subjects:
nanoindentation
topography
piezoelectric
Online Access:https://www.mdpi.com/2076-3417/14/24/11849

Internet

https://www.mdpi.com/2076-3417/14/24/11849

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