Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Protocol for nanoscale thermal mapping of electronic devices using atomic force microscopy with phase change material

Summary: In this protocol, we present a facile nanoscale thermal mapping technique for electronic devices by use of atomic force microscopy and a phase change material Ge2Sb2Te5. We describe steps for Ge2Sb2Te5 thin film coating, Ge2Sb2Te5 temperature calibration, thermal mapping by varying heater p...

Полное описание

Библиографические подробности
Главные авторы:	Qilong Cheng, Sukumar Rajauria, Erhard Schreck, Robert Smith, Na Wang, Jim Reiner, Qing Dai, David Bogy
Формат:	Статья
Язык:	English
Опубликовано:	Elsevier 2024-06-01
Серии:	STAR Protocols
Предметы:	Atomic Force Microscopy (AFM) Microscopy Physics Material sciences
Online-ссылка:	http://www.sciencedirect.com/science/article/pii/S2666166724002041

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