Evaluation of piezoresistivity properties of sputtered ZnO thin films

Evaluation of piezoresistivity properties of sputtered ZnO thin films

Zinc oxide (ZnO) thin films were deposited by RF reactive magnetron sputtering on silicon (100) substrates under different experimental conditions. ZnO films were studied before and after annealing treatment at 600 °C. The crystallinity, electrical resistivity, stoichiometry, thickness, and elastic...

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Bibliographic Details
Main Authors: Guilherme Wellington Alves Cardoso, Gabriela Leal, Argemiro Soares da Silva Sobrinho, Mariana Amorim Fraga, Marcos Massi
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2014-06-01
Series:Materials Research
Subjects:
ZnO
thin film
magnetron sputtering
piezoresistivity
Online Access:http://www.scielo.br/pdf/mr/v17n3/aop_matres_211913.pdf

Internet

http://www.scielo.br/pdf/mr/v17n3/aop_matres_211913.pdf

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