Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection
The NiCr igniter is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the igniter accidentally. To protect the NiCr igniter from damage by ESD, a novel NiCr igniter by integrating the igniter onto a TVS diode based substrate was designed and...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0137883 |