Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection
The NiCr igniter is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the igniter accidentally. To protect the NiCr igniter from damage by ESD, a novel NiCr igniter by integrating the igniter onto a TVS diode based substrate was designed and...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0137883 |
| _version_ | 1797771924034551808 |
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| author | Wei Liu Xiao-ming Ren Rui-zhen Xie Lan Liu Ke-xin Yu Xiang-fei Ji Wei Ren En-yi Chu |
| author_facet | Wei Liu Xiao-ming Ren Rui-zhen Xie Lan Liu Ke-xin Yu Xiang-fei Ji Wei Ren En-yi Chu |
| author_sort | Wei Liu |
| collection | DOAJ |
| description | The NiCr igniter is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the igniter accidentally. To protect the NiCr igniter from damage by ESD, a novel NiCr igniter by integrating the igniter onto a TVS diode based substrate was designed and fabricated through semiconductor technology. The microscope photograph, resistivity, breakdown voltage, firing performance, and ESD protection ability were tested. The results show that the surface of the chip is smooth, the edges of key structures are clear, and there are no major scratches, cracks, and other phenomena on the whole device. The resistivity of all the TVS-mNiCr igniters is between 5 and 7 Ω, and the TVS diode resistance value is normal. The breakdown voltages of the eight types of TVS diodes with different structures are all between 3.5 and 5 V, and the TVS-mNiCr igniters can fire reliably at a constant current of 2 A. After the ESD test, the microscope of the igniter does not change significantly, meaning that the TVS-mNiCr igniter chip has a certain ability of ESD protection. It is of vital importance to guide the design of electrostatic tolerant ability for the MEMS-based electro-explosive device. |
| first_indexed | 2024-03-12T21:44:40Z |
| format | Article |
| id | doaj.art-c1060f5944a443c998f17d63b3c14bac |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-03-12T21:44:40Z |
| publishDate | 2023-03-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-c1060f5944a443c998f17d63b3c14bac2023-07-26T14:03:58ZengAIP Publishing LLCAIP Advances2158-32262023-03-01133035207035207-710.1063/5.0137883Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protectionWei Liu0Xiao-ming Ren1Rui-zhen Xie2Lan Liu3Ke-xin Yu4Xiang-fei Ji5Wei Ren6En-yi Chu7Science and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaScience and Technology on Applied Physical Chemistry Laboratory, Shaanxi Applied Physics and Chemistry Institute, Xi’an 710061, ChinaThe NiCr igniter is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the igniter accidentally. To protect the NiCr igniter from damage by ESD, a novel NiCr igniter by integrating the igniter onto a TVS diode based substrate was designed and fabricated through semiconductor technology. The microscope photograph, resistivity, breakdown voltage, firing performance, and ESD protection ability were tested. The results show that the surface of the chip is smooth, the edges of key structures are clear, and there are no major scratches, cracks, and other phenomena on the whole device. The resistivity of all the TVS-mNiCr igniters is between 5 and 7 Ω, and the TVS diode resistance value is normal. The breakdown voltages of the eight types of TVS diodes with different structures are all between 3.5 and 5 V, and the TVS-mNiCr igniters can fire reliably at a constant current of 2 A. After the ESD test, the microscope of the igniter does not change significantly, meaning that the TVS-mNiCr igniter chip has a certain ability of ESD protection. It is of vital importance to guide the design of electrostatic tolerant ability for the MEMS-based electro-explosive device.http://dx.doi.org/10.1063/5.0137883 |
| spellingShingle | Wei Liu Xiao-ming Ren Rui-zhen Xie Lan Liu Ke-xin Yu Xiang-fei Ji Wei Ren En-yi Chu Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection AIP Advances |
| title | Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection |
| title_full | Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection |
| title_fullStr | Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection |
| title_full_unstemmed | Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection |
| title_short | Fabrication and performance of a nickel-chromium (NiCr) igniter integrated with TVS diode for ESD protection |
| title_sort | fabrication and performance of a nickel chromium nicr igniter integrated with tvs diode for esd protection |
| url | http://dx.doi.org/10.1063/5.0137883 |
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