Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded

Optical Performance of Top-Down Fabricated AlGaN Nanorod Arrays with Multi-Quantum Wells Embedded

Abstract Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning electron microscopy and transmission ele...

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Bibliographic Details
Main Authors: Shucheng Ge, Jiangping Dai, Na Gao, Shiqiang Lu, Penggang Li, Kai Huang, Bin Liu, Junyong Kang, Rong Zhang, Youdou Zheng
Format: Article
Language:English
Published: SpringerOpen 2019-05-01
Series:Nanoscale Research Letters
Subjects:
DUV AlGaN multi-quantum wells
Nanorod light-emitting diodes
Internal quantum efficiency
Light extraction
Online Access:http://link.springer.com/article/10.1186/s11671-019-3003-1

Internet

http://link.springer.com/article/10.1186/s11671-019-3003-1

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