Extracting mechanical and microstructural properties of Cu–Zr thin film alloys by MEMS, AFM and ellipsometer

Extracting mechanical and microstructural properties of Cu–Zr thin film alloys by MEMS, AFM and ellipsometer

The quantification of the atomic concentration ratios of thin-film metallic alloys having low atomic ordering is challenging, particularly if they are grown on similar metals and possess different surface chemistries. Micromechanical and optical methods have been used to correlate the elemental rati...

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Bibliographic Details
Main Authors: Nahed Alarifi, Mahmoud A Al-Gawati, Fahad Alnjiman, Hamad Albrithen, Abdullah N Alodhayb
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:Materials Research Express
Subjects:
atomic force microscopy
microelectromechanical system
cantilevers
ellipsometer
Online Access:https://doi.org/10.1088/2053-1591/ad068b

Internet

https://doi.org/10.1088/2053-1591/ad068b

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