Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium...

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Bibliographic Details
Main Authors: Andrei V. Turutin, Elena A. Skryleva, Ilya V. Kubasov, Filipp O. Milovich, Alexander A. Temirov, Kirill V. Raketov, Aleksandr M. Kislyuk, Roman N. Zhukov, Boris R. Senatulin, Victor V. Kuts, Mikhail D. Malinkovich, Yuriy N. Parkhomenko, Nikolai A. Sobolev
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Materials
Subjects:
MEMS
magnetic sensors
metglas
bidomain lithium niobate
magnetoelectric effect
thin films
Online Access:https://www.mdpi.com/1996-1944/16/2/484

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https://www.mdpi.com/1996-1944/16/2/484

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