Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor
Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were conne...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/23/8153 |