Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor
Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were conne...
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/23/8153 |
| _version_ | 1797507169344552960 |
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| author | Myoung-Ock Cho Woojin Jang Si-Hyung Lim |
| author_facet | Myoung-Ock Cho Woojin Jang Si-Hyung Lim |
| author_sort | Myoung-Ock Cho |
| collection | DOAJ |
| description | Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were connected to a Wheatstone bridge circuit, and the resistance difference between the thermistors resulting from the generation of a flow was converted into an output voltage signal using LabVIEW software. A mini tube flow test was conducted to demonstrate the sensor’s detection of fluid velocity in gas and liquid flows. A good correlation was found between the experimental results and the simulation data. However, the results for the gas and liquid flows differed in that for gas, the output voltage increased with the fluid’s velocity and decreased against the liquid’s flow velocity. This study’s MEMS-based flexible microthermal flow sensor achieved a resolution of 1.1 cm/s in a liquid flow and 0.64 cm/s in a gas flow, respectively, within a fluid flow velocity range of 0–40 cm/s. The sensor is suitable for many applications; however, with some adaptations to its electrical packaging, it will be particularly suitable for detecting biosignals in healthcare applications, including measuring respiration and body fluids. |
| first_indexed | 2024-03-10T04:44:48Z |
| format | Article |
| id | doaj.art-c13a021fd1774dfbb151937c28d2c461 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T04:44:48Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c13a021fd1774dfbb151937c28d2c4612023-11-23T03:04:45ZengMDPI AGSensors1424-82202021-12-012123815310.3390/s21238153Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow SensorMyoung-Ock Cho0Woojin Jang1Si-Hyung Lim2Department of Mechanical Systems Engineering, Graduate School, Kookmin University, Seoul 02707, KoreaDepartment of Mechanical Systems Engineering, Graduate School, Kookmin University, Seoul 02707, KoreaSchool of Mechanical Engineering, Kookmin University, Seoul 02707, KoreaBased on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were connected to a Wheatstone bridge circuit, and the resistance difference between the thermistors resulting from the generation of a flow was converted into an output voltage signal using LabVIEW software. A mini tube flow test was conducted to demonstrate the sensor’s detection of fluid velocity in gas and liquid flows. A good correlation was found between the experimental results and the simulation data. However, the results for the gas and liquid flows differed in that for gas, the output voltage increased with the fluid’s velocity and decreased against the liquid’s flow velocity. This study’s MEMS-based flexible microthermal flow sensor achieved a resolution of 1.1 cm/s in a liquid flow and 0.64 cm/s in a gas flow, respectively, within a fluid flow velocity range of 0–40 cm/s. The sensor is suitable for many applications; however, with some adaptations to its electrical packaging, it will be particularly suitable for detecting biosignals in healthcare applications, including measuring respiration and body fluids.https://www.mdpi.com/1424-8220/21/23/8153MEMSflexible thermal flow sensormicroheaterflow measurement |
| spellingShingle | Myoung-Ock Cho Woojin Jang Si-Hyung Lim Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor Sensors MEMS flexible thermal flow sensor microheater flow measurement |
| title | Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor |
| title_full | Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor |
| title_fullStr | Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor |
| title_full_unstemmed | Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor |
| title_short | Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor |
| title_sort | fabrication and evaluation of a flexible mems based microthermal flow sensor |
| topic | MEMS flexible thermal flow sensor microheater flow measurement |
| url | https://www.mdpi.com/1424-8220/21/23/8153 |
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