Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were conne...

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Bibliographic Details
Main Authors: Myoung-Ock Cho, Woojin Jang, Si-Hyung Lim
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Sensors
Subjects:
MEMS
flexible thermal flow sensor
microheater
flow measurement
Online Access:https://www.mdpi.com/1424-8220/21/23/8153

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