The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range

The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range

We present a calibrated spectrum in the 5.5–265.5 nm range from a microdroplet-tin Nd:YAG-laser-produced plasma under conditions relevant for the production of extreme ultraviolet (EUV) light at 13.5 nm for nanolithography. The plasma emission spectrum obtained using a custom-built transmission grat...

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Bibliographic Details
Main Authors: Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W. Ubachs, R. Hoekstra, M. Bayraktar, O. O. Versolato
Format: Article
Language:English
Published: AIP Publishing LLC 2021-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0073839

Internet

http://dx.doi.org/10.1063/5.0073839

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