Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique

Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique

Three-dimensional (3D) microstructures have been exploited in various applications of microfluidic devices. Multilevel structures in micromixers are among the essential structures in microfluidic devices that exploit 3D microstructures for different tasks. The efficiency of the micromixing process i...

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Bibliographic Details
Main Authors: Intan Sue Liana Abdul Hamid, Beh Khi Khim, Sofiyah Sal Hamid, Mohamad Faizal Abd Rahman, Asrulnizam Abd Manaf
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Micromachines
Subjects:
grayscale photolithography technique
micromixer
mixing performance
3D microstructures
Online Access:https://www.mdpi.com/2072-666X/11/6/548

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https://www.mdpi.com/2072-666X/11/6/548

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