Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique
Three-dimensional (3D) microstructures have been exploited in various applications of microfluidic devices. Multilevel structures in micromixers are among the essential structures in microfluidic devices that exploit 3D microstructures for different tasks. The efficiency of the micromixing process i...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/6/548 |
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| author | Intan Sue Liana Abdul Hamid Beh Khi Khim Sofiyah Sal Hamid Mohamad Faizal Abd Rahman Asrulnizam Abd Manaf |
| author_facet | Intan Sue Liana Abdul Hamid Beh Khi Khim Sofiyah Sal Hamid Mohamad Faizal Abd Rahman Asrulnizam Abd Manaf |
| author_sort | Intan Sue Liana Abdul Hamid |
| collection | DOAJ |
| description | Three-dimensional (3D) microstructures have been exploited in various applications of microfluidic devices. Multilevel structures in micromixers are among the essential structures in microfluidic devices that exploit 3D microstructures for different tasks. The efficiency of the micromixing process is thus crucial, as it affects the overall performance of a microfluidic device. Microstructures are currently fabricated by less effective techniques due to a slow point-to-point and layer-by-layer pattern exposure by using sophisticated and expensive equipment. In this work, a grayscale photolithography technique is proposed with the capability of simultaneous control on lateral and vertical dimensions of microstructures in a single mask implementation. Negative photoresist SU8 is used for mould realisation with structural height ranging from 163.8 to 1108.7 µm at grayscale concentration between 60% to 98%, depending on the UV exposure time. This technique is exploited in passive micromixers fabrication with multilevel structures to study the mixing performance. Based on optical absorbance analysis, it is observed that 3D serpentine structure gives the best mixing performance among other types of micromixers. |
| first_indexed | 2024-03-10T19:31:47Z |
| format | Article |
| id | doaj.art-c173115f01c2401bb81f1016e4cff4b0 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T19:31:47Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c173115f01c2401bb81f1016e4cff4b02023-11-20T02:06:42ZengMDPI AGMicromachines2072-666X2020-05-0111654810.3390/mi11060548Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography TechniqueIntan Sue Liana Abdul Hamid0Beh Khi Khim1Sofiyah Sal Hamid2Mohamad Faizal Abd Rahman3Asrulnizam Abd Manaf4Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, MalaysiaCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, MalaysiaCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, MalaysiaCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, MalaysiaCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, MalaysiaThree-dimensional (3D) microstructures have been exploited in various applications of microfluidic devices. Multilevel structures in micromixers are among the essential structures in microfluidic devices that exploit 3D microstructures for different tasks. The efficiency of the micromixing process is thus crucial, as it affects the overall performance of a microfluidic device. Microstructures are currently fabricated by less effective techniques due to a slow point-to-point and layer-by-layer pattern exposure by using sophisticated and expensive equipment. In this work, a grayscale photolithography technique is proposed with the capability of simultaneous control on lateral and vertical dimensions of microstructures in a single mask implementation. Negative photoresist SU8 is used for mould realisation with structural height ranging from 163.8 to 1108.7 µm at grayscale concentration between 60% to 98%, depending on the UV exposure time. This technique is exploited in passive micromixers fabrication with multilevel structures to study the mixing performance. Based on optical absorbance analysis, it is observed that 3D serpentine structure gives the best mixing performance among other types of micromixers.https://www.mdpi.com/2072-666X/11/6/548grayscale photolithography techniquemicromixermixing performance3D microstructures |
| spellingShingle | Intan Sue Liana Abdul Hamid Beh Khi Khim Sofiyah Sal Hamid Mohamad Faizal Abd Rahman Asrulnizam Abd Manaf Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique Micromachines grayscale photolithography technique micromixer mixing performance 3D microstructures |
| title | Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique |
| title_full | Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique |
| title_fullStr | Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique |
| title_full_unstemmed | Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique |
| title_short | Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique |
| title_sort | implementation of a single emulsion mask for three dimensional 3d microstructure fabrication of micromixers using the grayscale photolithography technique |
| topic | grayscale photolithography technique micromixer mixing performance 3D microstructures |
| url | https://www.mdpi.com/2072-666X/11/6/548 |
| work_keys_str_mv | AT intansuelianaabdulhamid implementationofasingleemulsionmaskforthreedimensional3dmicrostructurefabricationofmicromixersusingthegrayscalephotolithographytechnique AT behkhikhim implementationofasingleemulsionmaskforthreedimensional3dmicrostructurefabricationofmicromixersusingthegrayscalephotolithographytechnique AT sofiyahsalhamid implementationofasingleemulsionmaskforthreedimensional3dmicrostructurefabricationofmicromixersusingthegrayscalephotolithographytechnique AT mohamadfaizalabdrahman implementationofasingleemulsionmaskforthreedimensional3dmicrostructurefabricationofmicromixersusingthegrayscalephotolithographytechnique AT asrulnizamabdmanaf implementationofasingleemulsionmaskforthreedimensional3dmicrostructurefabricationofmicromixersusingthegrayscalephotolithographytechnique |