Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations
MEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper,...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/5/654 |