Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations
MEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper,...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/5/654 |
| _version_ | 1797497869726384128 |
|---|---|
| author | Zhichao Shi Emile Martincic Johan Moulin Elie Lefeuvre Frédéric Lamarque |
| author_facet | Zhichao Shi Emile Martincic Johan Moulin Elie Lefeuvre Frédéric Lamarque |
| author_sort | Zhichao Shi |
| collection | DOAJ |
| description | MEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper, MEMS bistable buckled beam actuators are presented. A series of structures based on pre-shaped buckled beams of lengths ranging from 2 to 4 mm, constant width of 5 μm and actuation stroke ranging from 20 to 100 μm was fabricated. Experimental data show a significant difference with predictions from a conventional analytical model. The model commonly used for buckled beams design assumes a rectangular beam section, but it is not the case of the fabricated beams. Furthermore, only symmetric buckling modes (mode 1, mode 3…) are supposed to exist during snap-through. In this paper, new analytical models have been developed on the basis of the models of the literature to consider the effective beam shape. The first improved analytical model enabled prediction of the MEMS buckled beams mechanical behavior in a 30% margin on the whole range of operation. A second model has been introduced to consider both the effective shape of the beam and centro-symmetric buckling modes. This refined model exhibits the partial suppression of buckling mode 2 by a central shuttle. Therefore, mode 2 and mode 3 coexist at the beginning and the end of snap-through, while mode 3 quickly vanishes due to increasing rotation of the central shuttle to leave exclusive presence of mode 2 near the mid-stroke. With this refined model, the effective force-displacement curve can be predicted in a margin reduced to a few percentages in the center zone of the response curve, allowing the accurate prediction of the position switch force. In addition, the proposed model allows accurate results to be reached with very small calculation time. |
| first_indexed | 2024-03-10T03:25:23Z |
| format | Article |
| id | doaj.art-c19eb657dff046f483734f8c420ca151 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T03:25:23Z |
| publishDate | 2022-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c19eb657dff046f483734f8c420ca1512023-11-23T12:11:06ZengMDPI AGMicromachines2072-666X2022-04-0113565410.3390/mi13050654Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication ConsiderationsZhichao Shi0Emile Martincic1Johan Moulin2Elie Lefeuvre3Frédéric Lamarque4Sino-French Engineer School, Nanjing University of Science and Technology, 200 Xiaolingwei Street, Nanjing 210094, ChinaCentre de Nanosciences et de Nanotechnologies, CNRS, Université Paris-Saclay, 91120 Palaiseau, FranceCentre de Nanosciences et de Nanotechnologies, CNRS, Université Paris-Saclay, 91120 Palaiseau, FranceCentre de Nanosciences et de Nanotechnologies, CNRS, Université Paris-Saclay, 91120 Palaiseau, FranceRoberval, CNRS, FRE 2012, Centre de Recherche Royallieu, Université de Technologie de Compiègne, Sorbonne Universités, 60203 Compiegne, FranceMEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper, MEMS bistable buckled beam actuators are presented. A series of structures based on pre-shaped buckled beams of lengths ranging from 2 to 4 mm, constant width of 5 μm and actuation stroke ranging from 20 to 100 μm was fabricated. Experimental data show a significant difference with predictions from a conventional analytical model. The model commonly used for buckled beams design assumes a rectangular beam section, but it is not the case of the fabricated beams. Furthermore, only symmetric buckling modes (mode 1, mode 3…) are supposed to exist during snap-through. In this paper, new analytical models have been developed on the basis of the models of the literature to consider the effective beam shape. The first improved analytical model enabled prediction of the MEMS buckled beams mechanical behavior in a 30% margin on the whole range of operation. A second model has been introduced to consider both the effective shape of the beam and centro-symmetric buckling modes. This refined model exhibits the partial suppression of buckling mode 2 by a central shuttle. Therefore, mode 2 and mode 3 coexist at the beginning and the end of snap-through, while mode 3 quickly vanishes due to increasing rotation of the central shuttle to leave exclusive presence of mode 2 near the mid-stroke. With this refined model, the effective force-displacement curve can be predicted in a margin reduced to a few percentages in the center zone of the response curve, allowing the accurate prediction of the position switch force. In addition, the proposed model allows accurate results to be reached with very small calculation time.https://www.mdpi.com/2072-666X/13/5/654MEMSbuckled beam micro-actuatorswitching forcedisplacement characterization |
| spellingShingle | Zhichao Shi Emile Martincic Johan Moulin Elie Lefeuvre Frédéric Lamarque Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations Micromachines MEMS buckled beam micro-actuator switching force displacement characterization |
| title | Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations |
| title_full | Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations |
| title_fullStr | Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations |
| title_full_unstemmed | Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations |
| title_short | Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations |
| title_sort | case study of a mems snap through actuator modeling and fabrication considerations |
| topic | MEMS buckled beam micro-actuator switching force displacement characterization |
| url | https://www.mdpi.com/2072-666X/13/5/654 |
| work_keys_str_mv | AT zhichaoshi casestudyofamemssnapthroughactuatormodelingandfabricationconsiderations AT emilemartincic casestudyofamemssnapthroughactuatormodelingandfabricationconsiderations AT johanmoulin casestudyofamemssnapthroughactuatormodelingandfabricationconsiderations AT elielefeuvre casestudyofamemssnapthroughactuatormodelingandfabricationconsiderations AT fredericlamarque casestudyofamemssnapthroughactuatormodelingandfabricationconsiderations |