The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films

The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films

In this paper, aluminum-doped zinc oxide (ZnO:Al or AZO) thin films are grown using atomic layer deposition (ALD) and the influence of postdeposition UV–ozone and thermal annealing treatments on the films’ properties are investigated. X-ray diffraction (XRD) revealed a polycrystalline wurtzite struc...

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Bibliographic Details
Main Authors: Dimitrina Petrova, Blagovest Napoleonov, Chau Nguyen Hong Minh, Vera Marinova, Yu-Pin Lan, Ivalina Avramova, Stefan Petrov, Blagoy Blagoev, Vladimira Videva, Velichka Strijkova, Ivan Kostadinov, Shiuan-Huei Lin, Dimitre Dimitrov
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Nanomaterials
Subjects:
aluminum-doped ZnO
ALD
transparent conducting oxide
XPS
oxygen vacancies
UV–ozone
Online Access:https://www.mdpi.com/2079-4991/13/5/800

Internet

https://www.mdpi.com/2079-4991/13/5/800

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