Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System
The mechanism of the inchworm motor, which overcomes the intrinsic displacement and force limitations of MEMS electrostatic actuators, has undergone constant development in the past few decades. In this work, the electrostatic actuation unit cell (AUC) that is designed to cooperate with many other c...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-10-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/10/10/276 |