Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

Customized piezoresistive cantilever microprobes with a deflection range of 120 ​μm and silicon tips of 100 ​μm height were operated in a Cypher AFM showing their functionality for measuring topography together with viscoelastic properties of thin films. For drop-in mounting in the AFM a holder was...

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Bibliographic Details
Main Authors: Michael Fahrbach, Sebastian Friedrich, Heinrich Behle, Min Xu, Brunero Cappella, Uwe Brand, Erwin Peiner
Format: Article
Language:English
Published: Elsevier 2021-06-01
Series:Measurement: Sensors
Subjects:
Cantilever microprobe
Piezoresistive
Atomic force microscopy
Force–distance curves
Contact resonance
Lubricants
Online Access:http://www.sciencedirect.com/science/article/pii/S2665917421000040

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http://www.sciencedirect.com/science/article/pii/S2665917421000040

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