Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

This paper presents a fully differential single-axis accelerometer fabricated using the MetalMUMPs process. The unique structural configuration and common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. CoventorWare is used in...

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Bibliographic Details
Main Authors: Hongwei Qu, Peng Qu
Format: Article
Language:English
Published: MDPI AG 2013-05-01
Series:Sensors
Subjects:
accelerometer
MetalMUMPs
capacitive sensor
fully differential sensing
Online Access:http://www.mdpi.com/1424-8220/13/5/5720

Internet

http://www.mdpi.com/1424-8220/13/5/5720

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