Effect of Temperature on Preparing Boron Nitride Interface on Fiber Surface by Chemical Vapor Deposition
Boron nitride interface was deposited on SiC fibers by chemical vapor deposition at different temperatures from BCl<sub>3</sub>-NH<sub>3</sub>-H<sub>2</sub> mixtures.The effect of temperature on deposition rate,morphology,composition and structure of the interface...
Main Authors: | , , , , |
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Format: | Article |
Language: | zho |
Published: |
Journal of Materials Engineering
2018-04-01
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Series: | Cailiao gongcheng |
Subjects: | |
Online Access: | http://jam.biam.ac.cn/CN/Y2018/V46/I4/31 |