Review on the Vapour-Phase Synthesis of Aluminum Nitride Powder Using Thermal Plasmas
Production of high purity aluminum nitride powder which can be processed into electronic packages at a cost competitive with existing lower performance ceramic packages has promoted the development of many different synthesis methods. A survey...
| Main Authors: | , |
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| Format: | Article |
| Sprog: | English |
| Udgivet: |
Hosokawa Powder Technology Foundation
2014-05-01
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| Serier: | KONA Powder and Particle Journal |
| Online adgang: | https://www.jstage.jst.go.jp/article/kona/17/0/17_1999015/_pdf/-char/en |