On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

Highlights Dense and flat freestanding Bi2Te3-based thermoelectric nano films were successfully fabricated by sputtering technology using a newly developed nano graphene oxide membrane as a substrate. On-chip micro temperature controllers were integrated using conventional micro-electromechanical sy...

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Bibliographic Details
Main Authors: Qun Jin, Tianxiao Guo, Nicolás Pérez, Nianjun Yang, Xin Jiang, Kornelius Nielsch, Heiko Reith
Format: Article
Language:English
Published: SpringerOpen 2024-02-01
Series:Nano-Micro Letters
Subjects:
Temperature control
Low-power electronics
On-chip micro temperature controller
Freestanding thermoelectric nano films
Temperature-sensitive components
Online Access:https://doi.org/10.1007/s40820-024-01342-3

Internet

https://doi.org/10.1007/s40820-024-01342-3

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