A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers

A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers

The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>&#931;</mo> <mo>&#916;</mo> </mrow> </semantics> </math> </inline-formula> (electromechanical sigma-delta) approach is a concise and effici...

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Bibliographic Details
Main Authors: Dongliang Chen, Liang Yin, Qiang Fu, Wenbo Zhang, Yihang Wang, Guorui Zhang, Yufeng Zhang, Xiaowei Liu
Format: Article
Language:English
Published: MDPI AG 2019-12-01
Series:Sensors
Subjects:
accelerometer
mems
sensor interface
electromechanical sigma-delta
Online Access:https://www.mdpi.com/1424-8220/20/1/91

Internet

https://www.mdpi.com/1424-8220/20/1/91

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