A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers
The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> (electromechanical sigma-delta) approach is a concise and effici...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/1/91 |
| _version_ | 1798042337808482304 |
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| author | Dongliang Chen Liang Yin Qiang Fu Wenbo Zhang Yihang Wang Guorui Zhang Yufeng Zhang Xiaowei Liu |
| author_facet | Dongliang Chen Liang Yin Qiang Fu Wenbo Zhang Yihang Wang Guorui Zhang Yufeng Zhang Xiaowei Liu |
| author_sort | Dongliang Chen |
| collection | DOAJ |
| description | The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop an intricate problem. The loop parameters of EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> can not be directly mapped from existing electrical <inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> modulator, and the synthesizing problem relies an experience-dependent trail-and-error procedure. In this paper, we provide a new point of view to consider the EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop. The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop is analyzed in detail from aspects of the signal loop, displacement modulation path and digital quantization loop. By taking a separate consideration of the signal loop and quantization noise loop, the design strategy is made clear and straightforward. On this basis, a discrete-time PID (proportional integral differential) loop compensator is introduced which enhances the in-band loop gain and suppresses the displacement modulation path, and hence, achieves better performance in system linearity and stability. A fifth-order EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> accelerometer system was designed and fabricated using 0.35 <inline-formula> <math display="inline"> <semantics> <mrow> <mi mathvariant="sans-serif">μ</mi> <mi mathvariant="normal">m</mi> </mrow> </semantics> </math> </inline-formula> CMOS-BCD technology. Based on proposed architecture and synthesizing procedure, the design effort was saved, and the in-band performance, linearity and stability were improved. A noise floor of 1 <inline-formula> <math display="inline"> <semantics> <mrow> <mi mathvariant="sans-serif">μ</mi> <mi mathvariant="normal">g</mi> <mo>/</mo> <msqrt> <mi>Hz</mi> </msqrt> </mrow> </semantics> </math> </inline-formula>, with a bandwidth 1 kHz and a dynamic range of 140 dB was achieved. |
| first_indexed | 2024-04-11T22:35:21Z |
| format | Article |
| id | doaj.art-c2e0b908866f4ed7b18f5c857e4d9725 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T22:35:21Z |
| publishDate | 2019-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-c2e0b908866f4ed7b18f5c857e4d97252022-12-22T03:59:15ZengMDPI AGSensors1424-82202019-12-012019110.3390/s20010091s20010091A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS AccelerometersDongliang Chen0Liang Yin1Qiang Fu2Wenbo Zhang3Yihang Wang4Guorui Zhang5Yufeng Zhang6Xiaowei Liu7MEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaMEMS Center, Harbin Institute of Technology, Harbin 150001, ChinaThe EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop an intricate problem. The loop parameters of EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> can not be directly mapped from existing electrical <inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> modulator, and the synthesizing problem relies an experience-dependent trail-and-error procedure. In this paper, we provide a new point of view to consider the EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop. The EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> loop is analyzed in detail from aspects of the signal loop, displacement modulation path and digital quantization loop. By taking a separate consideration of the signal loop and quantization noise loop, the design strategy is made clear and straightforward. On this basis, a discrete-time PID (proportional integral differential) loop compensator is introduced which enhances the in-band loop gain and suppresses the displacement modulation path, and hence, achieves better performance in system linearity and stability. A fifth-order EM-<inline-formula> <math display="inline"> <semantics> <mrow> <mo>Σ</mo> <mo>Δ</mo> </mrow> </semantics> </math> </inline-formula> accelerometer system was designed and fabricated using 0.35 <inline-formula> <math display="inline"> <semantics> <mrow> <mi mathvariant="sans-serif">μ</mi> <mi mathvariant="normal">m</mi> </mrow> </semantics> </math> </inline-formula> CMOS-BCD technology. Based on proposed architecture and synthesizing procedure, the design effort was saved, and the in-band performance, linearity and stability were improved. A noise floor of 1 <inline-formula> <math display="inline"> <semantics> <mrow> <mi mathvariant="sans-serif">μ</mi> <mi mathvariant="normal">g</mi> <mo>/</mo> <msqrt> <mi>Hz</mi> </msqrt> </mrow> </semantics> </math> </inline-formula>, with a bandwidth 1 kHz and a dynamic range of 140 dB was achieved.https://www.mdpi.com/1424-8220/20/1/91accelerometermemssensor interfaceelectromechanical sigma-delta |
| spellingShingle | Dongliang Chen Liang Yin Qiang Fu Wenbo Zhang Yihang Wang Guorui Zhang Yufeng Zhang Xiaowei Liu A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers Sensors accelerometer mems sensor interface electromechanical sigma-delta |
| title | A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers |
| title_full | A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers |
| title_fullStr | A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers |
| title_full_unstemmed | A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers |
| title_short | A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers |
| title_sort | straightforward approach for synthesizing electromechanical sigma delta mems accelerometers |
| topic | accelerometer mems sensor interface electromechanical sigma-delta |
| url | https://www.mdpi.com/1424-8220/20/1/91 |
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