An Integrated Solution to FIB-Induced Hydride Artifacts in Pure Zirconium
The preparation method of transmission electron microscopy (TEM) samples for pure zirconium was successfully executed using a focused ion beam (FIB) system. These samples unveiled artifact hydrides induced during the FIB sample preparation process, which resulted from stress damage, ion implantation...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2024-08-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/15/8/999 |