Pulse Laser Sulfur-Hyperdoping of Germanium and High Quantum Efficiency Photodiodes
Germanium was successfully hyperdoped with sulfur by means of nanosecond pulse laser and SF6 gas. A photodiode was fabricated based on sulfur-hyperdoped germanium. Rectifying current-voltage characteristics were observed for the device. The sulfur-hyperdoped germanium photodiode showed an internal q...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7579609/ |