In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges

In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges

The newly proposed in-plane resonant nano-electro-mechanical (IP R-NEM) sensor, that includes a doubly clamped suspended beam and two side electrodes, achieved a mass sensitivity of less than zepto g/Hz based on analytical and numerical analyses. The high frequency characterization and numerical/ana...

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Bibliographic Details
Main Authors: Hiroshi Mizuta, Faezeh Arab Hassani, Yoshishige Tsuchiya
Format: Article
Language:English
Published: MDPI AG 2013-07-01
Series:Sensors
Subjects:
nano-electro-mechanical sensors
resonance detection
total quality factor
junction-less field-effect-transistor
metal-oxide-semiconductor field-effect-transistor
Online Access:http://www.mdpi.com/1424-8220/13/7/9364

Internet

http://www.mdpi.com/1424-8220/13/7/9364

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