Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch...

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Bibliographic Details
Main Authors: Xinyu Wang, Kai Wu, Chengxiang Wang, Qingsong Li, Zhanqiang Hou, Dingbang Xiao, Xuezhong Wu
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Micromachines
Subjects:
MEMS gyroscope
frequency splitting
mechanical trimming
femtosecond laser
Online Access:https://www.mdpi.com/2072-666X/14/10/1957

Internet

https://www.mdpi.com/2072-666X/14/10/1957

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