Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope
The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/10/1957 |
| _version_ | 1797572955635449856 |
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| author | Xinyu Wang Kai Wu Chengxiang Wang Qingsong Li Zhanqiang Hou Dingbang Xiao Xuezhong Wu |
| author_facet | Xinyu Wang Kai Wu Chengxiang Wang Qingsong Li Zhanqiang Hou Dingbang Xiao Xuezhong Wu |
| author_sort | Xinyu Wang |
| collection | DOAJ |
| description | The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz. |
| first_indexed | 2024-03-10T21:02:57Z |
| format | Article |
| id | doaj.art-c386c715639f440a9df2c1182d8ae0ec |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T21:02:57Z |
| publishDate | 2023-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-c386c715639f440a9df2c1182d8ae0ec2023-11-19T17:25:22ZengMDPI AGMicromachines2072-666X2023-10-011410195710.3390/mi14101957Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS GyroscopeXinyu Wang0Kai Wu1Chengxiang Wang2Qingsong Li3Zhanqiang Hou4Dingbang Xiao5Xuezhong Wu6College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, ChinaThe MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz.https://www.mdpi.com/2072-666X/14/10/1957MEMS gyroscopefrequency splittingmechanical trimmingfemtosecond laser |
| spellingShingle | Xinyu Wang Kai Wu Chengxiang Wang Qingsong Li Zhanqiang Hou Dingbang Xiao Xuezhong Wu Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope Micromachines MEMS gyroscope frequency splitting mechanical trimming femtosecond laser |
| title | Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope |
| title_full | Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope |
| title_fullStr | Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope |
| title_full_unstemmed | Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope |
| title_short | Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope |
| title_sort | research on the mass adding and removing combined mechanical trimming method of the ring mems gyroscope |
| topic | MEMS gyroscope frequency splitting mechanical trimming femtosecond laser |
| url | https://www.mdpi.com/2072-666X/14/10/1957 |
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