Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

Abstract We present a site-specific elemental analysis of nano-scale patterns whereby the data acquisition is based on Rutherford backscattering spectrometry (RBS). The analysis builds on probing a large ensemble of identical nanostructures. This ensures that a very good limit of detection can be ac...

Full description

Bibliographic Details
Main Authors: Niels Claessens, Zamran Zahoor Khan, Negin Rahnemai Haghighi, Annelies Delabie, André Vantomme, Wilfried Vandervorst, Johan Meersschaut
Format: Article
Language:English
Published: Nature Portfolio 2022-10-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-22645-8

Internet

https://doi.org/10.1038/s41598-022-22645-8

Similar Items