An Improved Optimization Model to Predict the Deposition Rate and Smoothness of Ni Pulse-Reverse Electroplating Based on ANN and Experimental Results
The metallic layers are an essential part of MEMS (micro electromechanical system) devices, and their deposition process must be accurately controlled; this may lead to difficulties as there are many input parameters for such a process. This research focuses on the input parameters’ effects on the N...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-12-01
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Series: | Metals |
Subjects: | |
Online Access: | https://www.mdpi.com/2075-4701/13/1/37 |