Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
Abstract Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize the sensing capabilities of CNTs in emerging micro- and nanotechnology applications. For such a direct CMOS-CNT integration, a key requirement i...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2023-11-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-023-00598-w |