Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency

Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency

Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithography and electrodeposition, and the effective Young’s modulus was evaluated by the resonance frequency method and finite...

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Bibliographic Details
Main Authors: Hitomi Watanabe, Tso-Fu Mark Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Electrochem
Subjects:
effective Young’s modulus
multi-layered structure
Ti/Au
electrodeposited gold
micro-cantilever
resonance frequency method
Online Access:https://www.mdpi.com/2673-3293/2/2/15

Internet

https://www.mdpi.com/2673-3293/2/2/15

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