Silicon Nanowires Length and Numbers Dependence on Sensitivity of the Field-Effect Transistor Sensor for Hepatitis B Virus Surface Antigen Detection
Silicon nanowire field effect transistor (NWFET) sensors have been demonstrated to have high sensitivity, are label free, and offer specific detection. This study explored the effect of nanowire dimensions on sensors’ sensitivity. We used sidewall spacer etching to fabricate polycrystalline silicon...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-02-01
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| Series: | Biosensors |
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| Online Access: | https://www.mdpi.com/2079-6374/12/2/115 |