Performance Analysis of Resonantly Driven Piezoelectric Sensors Operating in Amplitude Mode and Phase Mode
Piezoelectric layers coupled to micromechanical resonators serve as the basis for sensors to detect a variety of different physical quantities. In contrast to passive sensors, actively operated sensors exploit a detuning of the resonance frequency caused by the signal to be measured. To detect the t...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/4/1899 |