Femtosecond Laser Direct‐Write Plasmonic Nanolithography in Dielectrics
Plasmon‐based devices have founded numerous applications in photonics based on optically excited strong near‐field effect at nanoscale. So far, the large‐area fabrication of periodic plasmonic nanostructures is still challenging due to a small write‐field limitation of lithography‐based techniques,...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley-VCH
2022-09-01
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Series: | Small Science |
Subjects: | |
Online Access: | https://doi.org/10.1002/smsc.202200038 |