Femtosecond Laser Direct‐Write Plasmonic Nanolithography in Dielectrics

Femtosecond Laser Direct‐Write Plasmonic Nanolithography in Dielectrics

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Plasmon‐based devices have founded numerous applications in photonics based on optically excited strong near‐field effect at nanoscale. So far, the large‐area fabrication of periodic plasmonic nanostructures is still challenging due to a small write‐field limitation of lithography‐based techniques,...

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Bibliographic Details
Main Authors: Han Zhu, Bo Wu, Mingsheng Gao, Feng Ren, Wei Qin, Saulius Juodkazis, Feng Chen
Format: Article
Language:English
Published: Wiley-VCH 2022-09-01
Series:Small Science
Subjects:
femtosecond laser direct-write
plasmonic nanolithography
structural color
surface plasmon resonance
Online Access:https://doi.org/10.1002/smsc.202200038

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