Thermo-Optic Phase Tuners Analysis and Design for Process Modules on a Silicon Nitride Platform
In this paper, we present a systematic design for manufacturing analysis for thermo-optic phase tuners, framed within the process modules available on a silicon nitride platform. Departing from an established technology platform, the heat distribution in various micro-structures was analyzed, both i...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-11-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/8/11/496 |