TSV‐based common‐mode noise‐suppressing filter design and implementation

Abstract A through‐silicon via (TSV)‐based, common‐mode, noise‐suppressing filter (TSV‐CMF) with the silicon interposer process is proposed to improve the electromagnetic compatibility in 3D integrated circuits. A differential fifth‐order T‐model low‐pass filter prototype circuit for transmission li...

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Main Authors: Zhensong Li, Huan Liu, Yunheng Sun, Yang Yang, Min Miao, Shenglin Ma, Yufeng Jin
Format: Article
Language:English
Published: Wiley 2022-03-01
Series:Electronics Letters
Online Access:https://doi.org/10.1049/ell2.12412
_version_ 1828405900981829632
author Zhensong Li
Huan Liu
Yunheng Sun
Yang Yang
Min Miao
Shenglin Ma
Yufeng Jin
author_facet Zhensong Li
Huan Liu
Yunheng Sun
Yang Yang
Min Miao
Shenglin Ma
Yufeng Jin
author_sort Zhensong Li
collection DOAJ
description Abstract A through‐silicon via (TSV)‐based, common‐mode, noise‐suppressing filter (TSV‐CMF) with the silicon interposer process is proposed to improve the electromagnetic compatibility in 3D integrated circuits. A differential fifth‐order T‐model low‐pass filter prototype circuit for transmission lines with common inductance is used to characterize and design the stopband and the corresponding two transmission zeros for the common mode (CM). The circuit parameters are carefully designed and calculated to fit the performance requirement. The TSV‐CMF is implemented in an interposer process with TSV as the vertical connect and redistribution layer (RDL) as the capacitance and inductance. TSV‐CMF samples are tested, and the measurement results match those of the full‐wave simulation. The differential cut‐off frequency of the TSV‐CMF can reach 16 GHz, and the CM stopband is around 5.3–16.0 GHz with 100% fractional bandwidth.
first_indexed 2024-12-10T11:02:47Z
format Article
id doaj.art-c43ddbc1072a4b3888a389a9d4a76f04
institution Directory Open Access Journal
issn 0013-5194
1350-911X
language English
last_indexed 2024-12-10T11:02:47Z
publishDate 2022-03-01
publisher Wiley
record_format Article
series Electronics Letters
spelling doaj.art-c43ddbc1072a4b3888a389a9d4a76f042022-12-22T01:51:39ZengWileyElectronics Letters0013-51941350-911X2022-03-0158624324510.1049/ell2.12412TSV‐based common‐mode noise‐suppressing filter design and implementationZhensong Li0Huan Liu1Yunheng Sun2Yang Yang3Min Miao4Shenglin Ma5Yufeng Jin6Academy of Smart IC and Networks Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science and Technology University Beijing ChinaBeijing Institute of Radio Measurement Beijing ChinaShanghai Institute of Satellite Engineering Shanghai ChinaShenzhen Graduate School of Peking University Shenzhen ChinaAcademy of Smart IC and Networks Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument Beijing Information Science and Technology University Beijing ChinaDepartment of Mechanical and Electrical Engineering Xiamen University Xiamen ChinaInstitute of Microelectronics Peking University Beijing ChinaAbstract A through‐silicon via (TSV)‐based, common‐mode, noise‐suppressing filter (TSV‐CMF) with the silicon interposer process is proposed to improve the electromagnetic compatibility in 3D integrated circuits. A differential fifth‐order T‐model low‐pass filter prototype circuit for transmission lines with common inductance is used to characterize and design the stopband and the corresponding two transmission zeros for the common mode (CM). The circuit parameters are carefully designed and calculated to fit the performance requirement. The TSV‐CMF is implemented in an interposer process with TSV as the vertical connect and redistribution layer (RDL) as the capacitance and inductance. TSV‐CMF samples are tested, and the measurement results match those of the full‐wave simulation. The differential cut‐off frequency of the TSV‐CMF can reach 16 GHz, and the CM stopband is around 5.3–16.0 GHz with 100% fractional bandwidth.https://doi.org/10.1049/ell2.12412
spellingShingle Zhensong Li
Huan Liu
Yunheng Sun
Yang Yang
Min Miao
Shenglin Ma
Yufeng Jin
TSV‐based common‐mode noise‐suppressing filter design and implementation
Electronics Letters
title TSV‐based common‐mode noise‐suppressing filter design and implementation
title_full TSV‐based common‐mode noise‐suppressing filter design and implementation
title_fullStr TSV‐based common‐mode noise‐suppressing filter design and implementation
title_full_unstemmed TSV‐based common‐mode noise‐suppressing filter design and implementation
title_short TSV‐based common‐mode noise‐suppressing filter design and implementation
title_sort tsv based common mode noise suppressing filter design and implementation
url https://doi.org/10.1049/ell2.12412
work_keys_str_mv AT zhensongli tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT huanliu tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT yunhengsun tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT yangyang tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT minmiao tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT shenglinma tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation
AT yufengjin tsvbasedcommonmodenoisesuppressingfilterdesignandimplementation