Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy
Dimensional microscopy is an essential tool for non-destructive and fast inspection of manufacturing processes. Standard approaches process only the measured images. By modelling the imaged structure and solving an inverse problem, the uncertainty on dimensional estimates can be reduced by orders of...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2022-01-01
|
| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_10010.pdf |