ITO microstructures regulation and properties based on deposition temperature
To improve the performance of thin film thermocouples for instantaneous temperature measurement on the surface of high temperature components of aeroengine， the indium tin oxide （ITO） thin films were prepared by DC magnetron sputtering. The microstructure of the thin film was regulated by the deposi...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | zho |
| Published: |
Journal of Materials Engineering
2024-09-01
|
| Series: | Cailiao gongcheng |
| Subjects: | |
| Online Access: | https://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2023.000842 |