Design of double layer resistance gird SOI strainometer and its application in coal mine
A double layer resistance gird SOI strainometer with micro fuse structure was designed. The strainometer is produced by techniques of thermally grown oxide, photoetching and mechanical erosion. It solves problems of normal SOI strainometer which has small bulk resistor and is vulnerable to pollution...
| Main Authors: | , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Industry and Mine Automation
2016-12-01
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| Series: | Gong-kuang zidonghua |
| Subjects: | |
| Online Access: | http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2016.12.003 |