Design of double layer resistance gird SOI strainometer and its application in coal mine
A double layer resistance gird SOI strainometer with micro fuse structure was designed. The strainometer is produced by techniques of thermally grown oxide, photoetching and mechanical erosion. It solves problems of normal SOI strainometer which has small bulk resistor and is vulnerable to pollution...
| Main Authors: | , , |
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| Format: | Article |
| Language: | zho |
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Editorial Department of Industry and Mine Automation
2016-12-01
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| Series: | Gong-kuang zidonghua |
| Subjects: | |
| Online Access: | http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2016.12.003 |
| _version_ | 1797868873835347968 |
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| author | FU Dongbo DU Taotao SHEN Shaoqun |
| author_facet | FU Dongbo DU Taotao SHEN Shaoqun |
| author_sort | FU Dongbo |
| collection | DOAJ |
| description | A double layer resistance gird SOI strainometer with micro fuse structure was designed. The strainometer is produced by techniques of thermally grown oxide, photoetching and mechanical erosion. It solves problems of normal SOI strainometer which has small bulk resistor and is vulnerable to pollution, and improves precision, insulativity and working stability of the strainometer. Field test results show that mine borehole stressmeter adopting the proposed SOI strainometer has high measuring accuracy and stable and reliable performance,and is suitable for stress monitoring of coal and rock mass. |
| first_indexed | 2024-04-10T00:03:44Z |
| format | Article |
| id | doaj.art-c4efa6b9c9a34523a1b86d4f107206b0 |
| institution | Directory Open Access Journal |
| issn | 1671-251X |
| language | zho |
| last_indexed | 2024-04-10T00:03:44Z |
| publishDate | 2016-12-01 |
| publisher | Editorial Department of Industry and Mine Automation |
| record_format | Article |
| series | Gong-kuang zidonghua |
| spelling | doaj.art-c4efa6b9c9a34523a1b86d4f107206b02023-03-17T01:41:45ZzhoEditorial Department of Industry and Mine AutomationGong-kuang zidonghua1671-251X2016-12-014212101410.13272/j.issn.1671-251x.2016.12.003Design of double layer resistance gird SOI strainometer and its application in coal mineFU Dongbo0DU Taotao1SHEN Shaoqun2Coal Mining and Designing Department, Tiandi Science and Technology Co.,Ltd.,Beijing 100013, ChinaCoal Mining and Designing Department, Tiandi Science and Technology Co.,Ltd.,Beijing 100013, ChinaSchool of Information Science and Technology, Fudan University, Shanghai 200433, ChinaA double layer resistance gird SOI strainometer with micro fuse structure was designed. The strainometer is produced by techniques of thermally grown oxide, photoetching and mechanical erosion. It solves problems of normal SOI strainometer which has small bulk resistor and is vulnerable to pollution, and improves precision, insulativity and working stability of the strainometer. Field test results show that mine borehole stressmeter adopting the proposed SOI strainometer has high measuring accuracy and stable and reliable performance,and is suitable for stress monitoring of coal and rock mass.http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2016.12.003coal miningdouble layer resistance girdsoi strainometerborehole stressmeter |
| spellingShingle | FU Dongbo DU Taotao SHEN Shaoqun Design of double layer resistance gird SOI strainometer and its application in coal mine Gong-kuang zidonghua coal mining double layer resistance gird soi strainometer borehole stressmeter |
| title | Design of double layer resistance gird SOI strainometer and its application in coal mine |
| title_full | Design of double layer resistance gird SOI strainometer and its application in coal mine |
| title_fullStr | Design of double layer resistance gird SOI strainometer and its application in coal mine |
| title_full_unstemmed | Design of double layer resistance gird SOI strainometer and its application in coal mine |
| title_short | Design of double layer resistance gird SOI strainometer and its application in coal mine |
| title_sort | design of double layer resistance gird soi strainometer and its application in coal mine |
| topic | coal mining double layer resistance gird soi strainometer borehole stressmeter |
| url | http://www.gkzdh.cn/article/doi/10.13272/j.issn.1671-251x.2016.12.003 |
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