Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror

Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror

Abstract This Research article document discussed about a new structure composed of a sub‐micron‐thick layer of a single‐crystal piezoelectric material on a substrate. Longitudinal waves are used for experimental demonstration with 4’’ collective processes. Electrical experimental–computation valida...

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Bibliographic Details
Main Authors: Thomas Baron, Stefania Oliveri, Thomas Richard, Valerie Soumann, Djaffar Belharet, Laurent Robert, Marina Raschetti, Roland Salut, Emilie Courjon, Thierry Laroche, Florent Bernard, Alexandre Clairet, Sylvain Ballandras
Format: Article
Language:English
Published: Wiley 2023-06-01
Series:Electronics Letters
Subjects:
5G mobile communication
acoustic devices
etching
microfabrication
nanofabrication
piezoelectric devices
Online Access:https://doi.org/10.1049/ell2.12713

Internet

https://doi.org/10.1049/ell2.12713

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