Polymer-Based Microring Resonator with the Multimode Interference Coupler Operating at Very-Near-Infrared Wavelengths

A microring resonator with the multimode interference coupler is fabricated on the polymer platform by using UV-based soft nanoimprint technique. A unique class of fluorinated polymer, perfluoropolyether (PFPE), is employed for the fabrication of the flexible soft mold. By optimizing the proportion...

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Bibliographic Details
Main Authors: Huanlin Lv, Yuxin Liang, Zhenlin Wu, Xiuyou Han, Geert Morthier, Mingshan Zhao
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/9/13/2715