Charge storage and tunneling mechanism of Ni nanocrystals embedded HfOx film
A nano-floating gate memory structure based on Ni nanocrystals (NCs) embedded HfOx film is deposited by means of radio-frequency magnetron sputtering. Microstructure investigations reveal that self-organized Ni-NCs with diameters of 4-8 nm are well dispersed in amorphous HfOx matrix. Pt/Ni-NCs embed...
| Huvudupphovsmän: | , , , , , |
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| Materialtyp: | Artikel |
| Språk: | English |
| Publicerad: |
AIP Publishing LLC
2016-05-01
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| Serie: | AIP Advances |
| Länkar: | http://dx.doi.org/10.1063/1.4948751 |