THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS
In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors (FOSs) were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on senso...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Bursa Uludag University
2023-04-01
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| Series: | Uludağ University Journal of The Faculty of Engineering |
| Subjects: | |
| Online Access: | https://dergipark.org.tr/tr/download/article-file/2515509 |