Phase and Residual Stress Evaluation of Dual-Phase Al<sub>70</sub>Cr<sub>30</sub>N and Al<sub>80</sub>Cr<sub>20</sub>N PVD Films
We investigated arc ion-plated Al<sub>70</sub>Cr<sub>30</sub>N and Al<sub>80</sub>Cr<sub>20</sub>N thin films deposited with three different bias voltages (50 V, 100 V, and 150 V) to study crystal phase stabilities, residual stresses, and mechanical pr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-07-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/9/7/362 |