An Investigation of Multi-Porous Silicon Gas Sensor
Efficient porous silicon organic vapors sensors werefabricated byemploying a multi-porous silicon layer (mPSi) within (Au/mPSi/n-Si/Au) sandwich structures. Based on the morphological nature and the resistivity of resulting (mPSi), the mechanism of current flow in the sensor was analyzed. The SEM im...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Unviversity of Technology- Iraq
2014-01-01
|
| Series: | Engineering and Technology Journal |
| Online Access: | https://etj.uotechnology.edu.iq/article_102308_a1c94a4136f60564c2ffa37b26b14cde.pdf |