An Investigation of Multi-Porous Silicon Gas Sensor
Efficient porous silicon organic vapors sensors werefabricated byemploying a multi-porous silicon layer (mPSi) within (Au/mPSi/n-Si/Au) sandwich structures. Based on the morphological nature and the resistivity of resulting (mPSi), the mechanism of current flow in the sensor was analyzed. The SEM im...
| 主要作者: | |
|---|---|
| 格式: | 文件 |
| 语言: | English |
| 出版: |
Unviversity of Technology- Iraq
2014-01-01
|
| 丛编: | Engineering and Technology Journal |
| 在线阅读: | https://etj.uotechnology.edu.iq/article_102308_a1c94a4136f60564c2ffa37b26b14cde.pdf |